Процессы плазменного травления в микро- и нанотехнологиях / : Учебное пособие / В. А. Галперин, Е. В. Данилкин, А. И. Мочалов ; под ред. С. П. Тимошенкова.
Material type:
TextLanguage: Russian Series: НанотехнологииPublication details: Москва : Бином. Лаб. знаний, 2010.Description: 283 с. : ил., таблISBN: - 9785996300327
| Item type | Current library | Collection | Call number | Status | Notes | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|
Գրքեր/Books
|
Fundamental Scientific Library | General | PII/655705 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0187230 |
Библиогр.: с. 275-280
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