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Моделирование гидромеханических процессов в технологии изготовления полупроводниковых приборов и микросхем / И.А. Белов,В.А. Шеленшкевич, Л.И. Шуб.

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Material type: Text

TextLanguage: Russian Publication details: Ленинград : Политехника, 1991.Description: 287 с. ил. 148, табл. 12ISBN:

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Holdings
Item type	Current library	Collection	Call number	Status	Notes	Date due	Barcode
Գրքեր/Books	Fundamental Scientific Library	General	PII/635081 (Browse shelf(Opens below))	Available	30 Days Loan		120635081

Библиогр.: с. 283-286

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