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Оборудование ионной имплантации / В.В. Симонов, Л.А. Корнилов, А.В. Шашелев, Е.В. Шокин.

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Material type: Text

TextLanguage: Russian Publication details: Москва : Радио и связь, 1988.Description: 182,[1] с. ; 22 смISBN:

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Holdings
Item type	Current library	Collection	Call number	Status	Notes	Date due	Barcode
Գրքեր/Books	Fundamental Scientific Library	General	PII/595326 (Browse shelf(Opens below))	Available	30 Days Loan		FL0020041

Библиогр.: с. 170-181 (69 назв.)

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